| 摘要 |
<p><P>PROBLEM TO BE SOLVED: To provide an ozone cleaning tank constituted so that ozone waterwhich has high ozone concentration, and contains no ozone bubbles at all or scarcely contains ozone bubbles, and to provide an ozone cleaning apparatus. <P>SOLUTION: Ultrapure water and ozone gas are supplied to an ozone water producing device 1 to produce ozone water-ozone gas mixed water. The mixed water is introduced into a gas-liquid separation chamber 4 via a pipe 2 and a receiving port 3 to float and separate bubbles of undissolved ozone gas in the mixed water. The ozone water containing no bubbles by the gas-liquid separation in the gas-liquid separation chamber 4 is introduced into a cleaning chamber 7 from a communication part 6. <P>COPYRIGHT: (C)2010,JPO&INPIT</p> |
