| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide a small piezoelectric component with an increased capacity at a low cost. <P>SOLUTION: The piezoelectric component includes the following configuration. Interdigitated finger electrodes 5, 5a, and 5b, wiring electrodes 6, 6a, and 6b, and at least two or more piezoelectric elements are joined and laminated on a principal plane of piezoelectric substrates 2, 3, and 4, so that a hollow part C may be formed between each piezoelectric element. Wherein, the wiring electrodes have element wiring placed adjacent to the interdigitated finger electrodes. Wherein, the at least two or more piezoelectric elements form an electrode terminal 8 connected to the wiring electrodes. Through electrodes 7 and 7a are formed by penetrating each of the piezoelectric substrates 3 and 4, and the through electrodes 7, 7a are connected to the electrode terminal 8. In addition, the piezoelectric substrates 2, 3, and 4 are sealed by a resin seal layer 10. <P>COPYRIGHT: (C)2010,JPO&INPIT |
