MANUFACTURING METHOD FOR PATTERN-FORMING BODY AND ELECTROMAGNETIC BEAM PROCESSING APPARATUS

摘要

Disclosed is a manufacturing method for a pattern-forming body that enables easy formation of a dot-like pattern without deforming the shape of a recessed part. The method is for manufacturing a pattern-forming body formed by the arrangement of a dot-like pattern. The manufacturing method has a preparation step for preparing a substrate having a photoresist layer that will change shape when heated by irradiation with an electromagnetic beam, and an exposure step wherein the photoresist layer is irradiated by scanning with a laser beam and a part of said photoresist layer is removed. In said exposure step, the time during which the laser beam is emitted is 10-40% of the scanning time corresponding to the spacing in the scanning direction of multiple recessed parts (21) formed on said photoresist layer.