发明名称 CUTWARE
摘要 PROBLEM TO BE SOLVED: To provide a cutware including a cleaning means capable of cleaning areas across a cut groove without moving largely beyond a cutting stroke. SOLUTION: The cutware includes a cutting means having a cutting blade 43 and a cut-feeding means for cut-feeding a chuck table 3, and includes blade covers provided at the front end of a spindle housing on both sides across the cutting blade 43 for covering the blade 43 and cutting water spraying means respectively provided on cover members 442 and including a cutting water spray nozzle 65 for spraying cutting water to a workpiece W. It also includes, on the downstream in the cut-feeding direction of the nozzle 65, cleaning fluid spraying means respectively provided on a first cover member and a second cover member 442 and including a cleaning fluid spray nozzle 65 for spraying a cleaning fluid containing cleaning water and high pressure air to the areas across the cut groove on the workpiece W immediately after cutting. COPYRIGHT: (C)2010,JPO&INPIT
申请公布号 JP2010046726(A) 申请公布日期 2010.03.04
申请号 JP20080210783 申请日期 2008.08.19
申请人 DISCO ABRASIVE SYST LTD 发明人 SATO MASAMI;NITTA HIDETSUGU
分类号 B24B55/02;B24B55/06;H01L21/301 主分类号 B24B55/02
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