| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide a highly-sensitive surface elastic wave type gas sensor having a structure wherein a sensitive film is not formed on an interdigital electrode or on a propagation domain between the interdigital electrode. Ž<P>SOLUTION: The interdigital electrode 11 comprises a material whose electric resistance is increased by being chemically reacted with detection object gas. The interdigital electrode 11 comprises Ag or Cu, and the detection object gas is hydrogen sulfide. Since having a structure wherein a sensitive film is not formed on the interdigital electrode or on the propagation domain between the interdigital electrode, a more highly-sensitive surface elastic wave type gas sensor can be realized. In addition, selectivity to hydrogen sulfide can be heightened by forming the interdigital electrode from Ag or Cu. Ž<P>COPYRIGHT: (C)2010,JPO&INPIT Ž
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