发明名称 MICROFEATURE WORKPIECE SUBSTRATES HAVING THROUGH-SUBSTRATE VIAS, AND ASSOCIATED METHODS OF FORMATION
摘要 Microfeature workpiece substrates having through-substrate vias, and associated methods of formation are disclosed. A method in accordance with one embodiment for forming a support substrate for carrying microfeature dies includes exposing a support substrate to an electrolyte, with the support substrate having a first side with a first conductive layer, a second side opposite the first side with a second conductive layer, and a conductive path extending through the support substrate from the first conductive layer to the second conductive layer. The method can further include forming a bond pad at a bond site of the first conductive layer by disposing at least one conductive bond pad material at the bond site, wherein disposing the at least one conductive bond pad material can include passing an electrical current between the first and second conductive layers via the conductive path, while the substrate is exposed to the electrolyte.
申请公布号 US2010052183(A1) 申请公布日期 2010.03.04
申请号 US20090615518 申请日期 2009.11.10
申请人 MICRON TECHNOLOGY, INC. 发明人 LEE TECK KHENG;LIM ANDREW CHONG PEI
分类号 H01L23/488 主分类号 H01L23/488
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