| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide an inspection apparatus with which the friction between the panel receiving surface of a panel receiver and a liquid crystal panel is reduced to reduce a wear of the panel receiver. Ž<P>SOLUTION: The inspection apparatus of a plate to be inspected includes: an inspection part for inspecting the plate to be inspected; an internal conveyance unit for conveying the plate to be inspected to the inspection part; and a transfer unit for receiving/delivering the plate to be inspected from/to the internal conveyance unit. The transfer unit includes: a positioning mechanism configured such that the plate to be inspected is positioned and supported to receive the plate to be inspected from an external conveyance unit and deliver the received plate to be inspected to the internal conveyance unit or to receive the plate to be inspected from the internal conveyance unit and deliver the received plate to be inspected to the external conveyance unit; and the panel receiver having the panel receiving surface which is used for receiving the plate to be inspected while being abutted on the backside of the plate to be inspected. A ball bearing or a gas spout is arranged on the panel receiving surface of the panel receiver. The gas to be jetted from the gas spout of the panel receiving surface is air or ion-containing air. Ž<P>COPYRIGHT: (C)2010,JPO&INPIT Ž
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