发明名称 METHOD AND SYSTEM FOR LOW COST INSPECTION
摘要 A method for macro inspection, the method includes: (i) concurrently illuminating a current group of spaced apart object sub areas; wherein light reflected in a specular manner from a certain object sub area of the current group of object sub areas is expected to be detected by a certain sensor element of a current group of spaced apart sensor elements that correspond to the current group of spaced apart object sub areas; wherein the object sub areas are spaced apart so as to reduce a probability of a detection of non-specular light from the object; wherein each image sub area comprises multiple pixels; (ii) obtaining image information from the current group of spaced apart sensor elements; and (iii) processing at least a portion of the image information to provide an inspection result.
申请公布号 WO2009024978(A3) 申请公布日期 2010.03.04
申请号 WO2008IL01144 申请日期 2008.08.21
申请人 CAMTEK LTD.;PELEG, OPHIR;BEN-EZER, ZEHAVA 发明人 PELEG, OPHIR;BEN-EZER, ZEHAVA
分类号 G01B11/24 主分类号 G01B11/24
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