发明名称 METHODS OF FABRICATING COMPLEX TWO-DIMENSIONAL CONDUCTIVE SILICIDES
摘要 <p>In an embodiment, a conductive suicide nanostructure (200) includes a plurality of two-dimensional nanonet sheets (201), wherein each of the nanonet sheets (201) include connected and spaced-apart nanobeams (202) linked together at an about 90-degree angle. In an embodiment, the plurality of nanonet sheets (201) are stacked approximately horizontally. In an embodiment, the plurality of nanonet sheets (201) have an electrical resistivity of approximately 10 µO-cm. In an embodiment, a method of fabricating a two-dimensional conductive suicide includes performing chemical vapor deposition, wherein one or more gas or liquid precursor materials carried by a carrier gas stream react to form a nanostructure (200) having a mesh-like appearance and including a plurality of connected and spaced-apart nanobeams (202) linked together at an about 90-degree angle.</p>
申请公布号 WO2010025124(A1) 申请公布日期 2010.03.04
申请号 WO2009US54864 申请日期 2009.08.25
申请人 THE TRUSTEES OF BOSTON COLLEGE;WANG, DUNWEI;ZHOU, SA 发明人 WANG, DUNWEI;ZHOU, SA
分类号 H01L21/02 主分类号 H01L21/02
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