| 摘要 |
PURPOSE: A unit for supporting a substrate is provided to suppress the damage to a senor due to a fume by arranging a sensor inside of a stage. CONSTITUTION: A substrate support unit comprises a stage(110), a supporting unit(120), a holder(130), a driving part(140), and a sensor(150). The supporting unit is arranged on the stage. The supporting unit rotates the substrate. The holder holds the edge part of the substrate. The driving part is connected to the holder. The driving part drives the holder. The sensor senses whether the holder holds the substrate or not.
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