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发明名称
METHOD FOR PRODUCING ROTORS OR STATORS OF A TURBOMOLECULAR PUMP
摘要
The invention relates to rotors or stators of a turbomolecular pump with rotor blades made of a specific aluminum alloy.
申请公布号
EP2013483(B1)
申请公布日期
2010.03.03
申请号
EP20070728629
申请日期
2007.04.27
申请人
OERLIKON LEYBOLD VACUUM GMBH
发明人
HOELZER, RAINER;FROITZHEIM, MICHAEL;ETSCHENBERG, LARS;ROTH, ISHAN
分类号
F04D19/04;C22C21/14;C22F1/057;F04D29/02
主分类号
F04D19/04
代理机构
代理人
主权项
地址
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