| 摘要 |
<p>To provide an electrostatic actuator capable of attaining a large diaphragm displacement by low voltage drive. Furthermore, a droplet discharge head provided with this electrostatic actuator, a method for driving a droplet discharge head, and a method for manufacturing an electrostatic actuator are provided. A diaphragm (4), an individual electrode (11) facing the diaphragm (4) with a gap (10) therebetween, while a voltage is applied between the diaphragm (4) and the individual electrode (11), and an insulating film (4a) which is disposed on a surface of the diaphragm (4), the surface facing the individual electrode (11), are included, wherein the insulating film (4a) is converted to an electret.</p> |
