A PRECURSOR COMPOSITION, METHOD OF FORMING A LAYER, METHOD OF MANUFACTURING A GATE STRUCTURE AND METHOD OF MANUFACTURING A CAPACITOR

摘要

PURPOSE: A precursor composition, a method of forming a layer, a method of manufacturing a gate structure and a method of manufacturing a capacitor are provided to form an excellent step coverage by using a precursor having improved thermal stability. CONSTITUTION: A stabilized precursor is provided on a substrate through a thin film forming method(S120). The precursor and an covalent bond compound are contacted with each other. The precursor comprises a core metal and a ligand. The Ligand is combined with a core metal. A reactant is provided on the substrate(S130). The reactant is combined with the core metal of the precursor.