| 摘要 |
PURPOSE: A processing system is provided to short a total length size by arranging a processing unit in a process flow order. CONSTITUTION: A processing system comprises a first process line, a second process line, a processing unit, and a first transfer system(22) of a third group. The first process line arranges the processing unit of the first group in a row through a transfer system unit. The second process line arranges the processing unit of the second group in a row through a transfer system unit. The second process line forms the first process line and an internal space. The processing unit of a third group is arranged in the internal space. The first transfer system carries the substrate from the processing unit into a substrate transfer unit.
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