| 摘要 |
An apparatus of forming a fine pattern includes a chamber having a predetermined process space, a stage for supporting a substrate on which a photosensitive organic layer is formed, using buoyancy, a template disposed away from the stage to imprint a preprocess pattern dividing etching and non-etching regions on the organic layer of the substrate, and a driving unit for moving the stage toward the template so that the pattern formed on the template can be formed on the organic layer of the substrate.
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