| 摘要 |
FIELD: measurement equipment. ^ SUBSTANCE: invention is related to gas-analysis instrument making and microelectronics and may be used in manufacturing. According to invention, method is based on measurement of electric characteristics of gas-sensitive layer of gas sensor with simultaneous or alternate action at gas-sensitive layer of gas sensor from the following factors: periodical change of temperature, periodical change of analysed gas pressure in measurement chamber, permanent or pulsating radiation of gas-sensitive layer with monochromatic light. At the same time period of temperature or radiation effect and period of pressure variation is considerably lower compared to time of electric characteristics measurement. Analysis of gas medium composition is carried out by comparison of flicker noise characteristics spectra of gas-sensitive layer of gas sensor in process of analysed gas medium gas molecules adsorption on its surface and spectra of flicker noise of gas sensitive layer, produced in absence of analysed gas, and determination of identifying criteria, such as values of derivative functions that form flicker noise spectra on sections between frequencies of flicker noise characteristics fracture, combination of values of determines composition of analysed gas medium. Gas sensor is also proposed. ^ EFFECT: invention provides for possibility to establish availability of this or that sort of gas molecules adsorbed on surface by frequency of fracture, which is specific for this sort of gas molecules, thus providing for the possibility to perform ecological monitoring of various chemical substances content, including resistant organic contaminants and chlorine organic compound, in environment. ^ 6 cl, 13 dwg, 1 ex |
