POWERFUL EUV RADIATION SOURCE

摘要

FIELD: physics. ^ SUBSTANCE: invention can be used for generating extreme ultraviolet (EUV) radiation. The powerful EUV radiation source with two disc-shaped electrodes rigidly mounted on a rotating shaft has a system for initiating discharge in the peripheral area of an interelectrode gap and a device for transferring plasma-forming metal to one of the electrodes which is the initiating electrode made in form of a vessel with low-melting metal. The electrodes are connected through liquid-metal sliding contacts to the power supply which includes a pulsed charging unit and a capacitor unit. The vessel with low-melting metal is made in form of a ring channel which is coaxial with the electrodes, and the initiating electrode has a ring lug immersed in the ring channel. In the initiating electrode there are end-to-end channels with inputs facing the ring channel and adjacent to the base of the lug on its inner side, and the outputs are placed in front of the working area of the electrode. The diametre of the circle along which outputs of the channels are placed is less than the diametre of the working area of the initiating electrode, and the diametre of the inner surface of the lug is not greater than the diametre of the circle along which outputs of channels lie. ^ EFFECT: increased energy stability of the source and efficiency of EUV radiation. ^ 3 cl, 1 dwg