| 摘要 |
PURPOSE: A photomask inspection system for LCD which is capable of centering for a gripper is provided to grasp the photomask by conforming automatically the height of the photomask housed in a case and the height of a gripper finger. CONSTITUTION: A floor support frame forms docking frames(15a) which moves between the casters of body part for a photomask transferring unit. A side guide roller(75) guides the docking frames to perform centering for the center axis of a gripper and the center of the side direction of the photomask. If a gripper finger conforms to the height of the photomask, a approaching sensor(45) outputs the rotation stop signal for a screw axis.
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