| 摘要 |
PROBLEM TO BE SOLVED: To provide a suck back valve provided with a suck valve function in an opening and closing valve. SOLUTION: The suck back valve SV includes a suck back chamber 17 formed in a passage in the opening and closing valve 10, a piston shaft part 33 for connecting an opening, closing and pressing member 40 axially moving in the sack back chamber 17 for pressing a valve body 11 to a piston body 31 and bellows 41 accommodating the piston shaft part 33 to separate an actuator 30 from the passage in the valve and having one end connected to the opening, closing and pressing member 40 and the other end supported by a casing 12. The suck back valve carries out a two-stage operation including a valve opening stage that when the valve body 11 is closed, the piston shaft part 33 moves to a completely closed position of the valve 11 together with the piston body 31 and the opening, closing and pressing member 40 and a suck back action stage that the piston shaft part 33 and the opening, closing and pressing member 40 further move from the completely closed position to increase a space volume of the suck back chamber 17. COPYRIGHT: (C)2010,JPO&INPIT
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