| 摘要 |
<P>PROBLEM TO BE SOLVED: To achieve a compact motion sensor for accurately detecting acceleration and an angular speed indicating three-dimensional motion state of a particular point in an object, and detecting a position of the object. <P>SOLUTION: The motion sensor includes: a frame fixed to the object whose acceleration and angular speed are detected; a plurality of beams coupled to the frame at one end, and protruded toward the inside of the frame at the other end; an annular movable ring coupled to the other end of a plurality of the beams, supported by a plurality of the beams, and moved relative to the frame inside the frame; a diaphragm expanded in the movable ring; an inner spindle coupled to the diaphragm, supported by the diaphragm, and moved relative to the movable ring inside the movable ring; a drive means for circumferentially moving the spindle; a plurality of piezoelectric elements provided in the diaphragm, and detecting angular speed components along three orthogonal axes; and a plurality of piezoresistive elements provided in a plurality of the beams, and detecting acceleration components along three orthogonal axes. <P>COPYRIGHT: (C)2010,JPO&INPIT |
