| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide a vibration gyro which is small, has high accuracy of detecting angular velocity, and is insusceptible to disturbance. <P>SOLUTION: The vibration gyro includes a circular or polygonal vibrator 11, a leg section 15 which supports the vibrator 11 flexibly and includes a fixed end, and a plurality of electrodes which are formed above the vibrator 11 and sandwich a piezoelectric film in the thickness direction by a first upper-layer metallic film 50 and a first lower-layer metallic film 30. The vibration gyro further includes a second lower-layer metallic film 31 which is formed on a silicon oxide film 20 on the leg section 15 and is continuous with the first lower-layer metallic film 30 and a second upper-layer metallic film 51 which is formed on or above the silicon oxide film 20, is continuous with the first upper-layer metallic film 50 through the upper surface of the piezoelectric film 40 without being in contact with the first lower-layer metallic film 30 and the second lower-layer metallic film 31, and is substantially the same layer as the second lower-layer metallic film. <P>COPYRIGHT: (C)2010,JPO&INPIT |
