| 摘要 |
PROBLEM TO BE SOLVED: To solve a problem that a conventional suspend metal mask has a limit in thinning paste for printing because a mask substrate is formed and therefore the thickness of the mask substrate affects printing. SOLUTION: A method of manufacturing a suspend metal mask includes the processes of: forming a resist pattern film 3 which has a pattern corresponding to the mask pattern on the surface of an electroforming matrix 1; etching a part which is not covered with the resist pattern film 3 to create a recess on the electroforming matrix 1; exfoliating the resist pattern film 3 from the electroforming matrix 1; forming a secondary resist film 6 on the surface of the electroforming matrix 1 where the irregularity is created; polishing the secondary resist film 6 so that a projection of the electroforming matrix 1 is exposed; bringing a conductive mesh screen 8 into close contact with the surfaces of the projection of the electroforming matrix 1 and the polished secondary resist film 6; applying plating thereto from the direction of the mesh screen 8 to form an electrodeposition layer 9, which is united with the mesh screen 8; and exfoliating the united mesh screen 8 and electrodeposition layer 9 from the electroforming matrix 1. COPYRIGHT: (C)2010,JPO&INPIT
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