| 摘要 |
Co-fabricating of vertical piezoelectric MEMS actuators that achieve large positive and negative displacements through operating electric fields in excess of the coercive field includes forming a large negative displacement vertical piezoelectric MEMS actuator, forming a bottom structural dielectric layer above a substrate layer; forming a bottom electrode layer above the structural dielectric layer; forming an active piezoelectric layer above the bottom electrode layer; forming a top electrode layer above the active piezoelectric layer; forming a top structural layer above the top electrode layer, wherein the x-y neutral plane of the negative displacement vertical piezoelectric MEMS actuator is above the mid-plane of the active piezoelectric layer, wherein the negative displacement vertical piezoelectric MEMS actuator is partially released from the substrate to allow free motion of the actuator; and combining the large negative displacement vertical piezoelectric MEMS actuator and a large positive displacement vertical piezoelectric MEMS actuator on the same the substrate.
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