发明名称 FEEDING METHOD AND APPARATUS OF SEMICONDUCTOR CHIP
摘要 PROBLEM TO BE SOLVED: To provide an apparatus that simultaneously feeds many small semiconductor chips at a desired location on a mounting substrate, at low cost. SOLUTION: A liquid drop feed apparatus is provided , consisting of a liquid drop feed substrate 10 that feeds liquid drops 15, including a semiconductor chip 50; a voltage controller 16 for feeding liquid drops and a voltage controller 17 for precharging that control a voltage to be applied to the liquid drop feed substrate 10; and a system apparatus 19, that outputs a controlling signal to the voltage controller 16 for feeding liquid drops and the voltage controller 17 for precharging. COPYRIGHT: (C)2010,JPO&INPIT
申请公布号 JP2010045145(A) 申请公布日期 2010.02.25
申请号 JP20080207563 申请日期 2008.08.12
申请人 HITACHI LTD 发明人 HASEBE TAKEHIKO;YAMAGUCHI YOSHIHIDE;MINAGAWA MADOKA;TAKENAKA HIROSHI;ISADA NAOYA
分类号 H01L21/50;H01L21/677 主分类号 H01L21/50
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