发明名称 Vorrichtung zum Ziehen duenner Staebe mit unterschiedlichem Durchmesser aus Halbleitermaterial
摘要 A long thin rod (16) of semi-conductor material is pulled by means of a pulling device (18) through a sealing device (72) from a molten zone produced by an induction coil (12) at the top of a thick rod (8) in a tube (1). The pulling device, which is adapted to accommodate rods of various diameters, pulls the thin rod at a constant pulling speed and simultaneously rotates it and maintains it axially aligned. The sealing device (Fig. 5) comprises ten spaced discs (94) of Teflon, each having a central aperture with radial slits for passage of the thin rod. Below the discs, in a casing (10), are situated three bearing rods (74) which maintain the thin rod axially aligned while accepting rods of varying diameter. The thick rod is supported on a rotary shaft (4) which is raised as pulling proceeds. A protective gas passes upwards through the tube and escapes between the thin rod and the discs. The distance between the bearing rods and the molten zone may be 1-7.
申请公布号 DE1519827(B1) 申请公布日期 1970.02.12
申请号 DE19641519827 申请日期 1964.04.30
申请人 MONSANTO CO 发明人 STEVENS HARRY MILTON;TUCKER WILLIAM FRANCIS
分类号 C30B13/32;C30B15/30;C30B15/32;(IPC1-7):01J17/18 主分类号 C30B13/32
代理机构 代理人
主权项
地址