Thermal Bend Actuator Comprising Bilayered Passive Beam

摘要

A thermal bend actuator comprises an active beam for connection to drive circuitry and a passive beam mechanically cooperating with the active beam. When a current is passed through the active beam, the active beam expands relative to the passive beam resulting in bending of the actuator. The passive beam is comprised of first and second layers, and the second layer is sandwiched between the first layer and the active beam. The second layer is relatively more thermally insulating than the first layer.