| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide a method for manufacturing a movable structure capable of easing various restrictions in the structure manufacturing process using a sacrificial material. Ž<P>SOLUTION: A first sacrificial material and a second sacrificial material are made to accumulate on substrate 1. A first pattern 2a and a second pattern 6a are formed with the first sacrificial material and the second sacrificial material, respectively. The first pattern created from the first sacrificial material is arranged on the second pattern created from the second sacrificial material. The first pattern is formed in the state where the surrounding portion of the second pattern is not covered. An active layer 3 covers at least whole sidewalls of the first pattern and the second pattern, and a predetermined area of the second pattern. The active layer is patterned so as to make it possible to access the first sacrificial material. The first sacrificial material and the second sacrificial material are removed selectively, and form the movable structure provided with the free area fixed to a substrate 1 by the fixed area. Ž<P>COPYRIGHT: (C)2010,JPO&INPIT Ž
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