| 摘要 |
PROBLEM TO BE SOLVED: To provide, by a simple configuration, a diaphragm pump capable of sucking and discharging liquid utilizing two forces acting on a diaphragm from both surface sides thereof in reverse directions, and a pump device having the diaphragm pump. SOLUTION: A coil spring 70 is coaxially fitted to the center shaft 62 of a rod 60 in the large diameter hole 33b of the through-hole 33 of a housing H, and locked between a boundary stage 33 between the large diameter hole 33b and the small diameter hole 33a thereof and the annular flange 62a of the center shaft 62. A supply hole 44 for supplying an air flow from an air flow supply source into a pressing chamber R1 is formed in a lower housing member 40. Since the biasing force of the coil spring 70 acts on a main diaphragm 90 via the base end side shaft 63 of the rod 60 from the pump chamber R2 side, the pressure of the air flow into the pressing chamber R2 acts on the main diaphragm 90 from the pressing chamber R1 side. COPYRIGHT: (C)2010,JPO&INPIT
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