| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide a probe card including a plurality of cantilever probe pins. Ž<P>SOLUTION: The probe card includes: a ceramic substrate having signal lines; a probe shell for connecting one end formed on the ceramic substrate to the signal lines, respectively; and a plurality of the probe pins having probe tips formed on the other end of the probe shell. Each probe shell is divided into a first region adjacent to the signal lines and a second region adjacent to the probe tips. The first region of the probe shell is banded together and integrated by an insulation support. The second region of the probe shell is separated and arranged so that the probe tips of the plurality of the probe pins are positioned in different measurement regions. Ž<P>COPYRIGHT: (C)2010,JPO&INPIT Ž
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