| 摘要 |
<p>PURPOSE: A storage container for liquid chlorosilane and a closing lid for the same are provided to prevent the generation of corrosive gas due to the leakage of contents. CONSTITUTION: A tank(11) contains chlorosilane liquid. Valves(40A,40B) are installed in the tank in which external pipes can be attached. Each valve is composed of a housing and a valve body formed within the housing. A closing lid is employed to seal the valves when the external pipes are detached or attached to the valves.</p> |
