| 摘要 |
<P>PROBLEM TO BE SOLVED: To reduce a heat load of a porous plate-made electrode by devising a shape of the porous plate-made electrode to achieve the high densification of electron beam excited plasma and service life prolongation of the electrode. <P>SOLUTION: In the electron beam generating device 5, the outer shape of each electrode part 10 held at an electrode holding part of a cooling chamber, shows a rectangular shape. The electrode part 10 includes a porous discharge anode 15, a porous accelerating electrode 16, a first insulating plate 17, a second insulating plate 18, a lead wire 19, and a frame-like metal plate 20. The first insulating plate 17 and the second insulating plate 18 are constituted of a heat-conductive electric insulating material, having a thermal conductivity of 5W/(m×K) or higher. The heat load of the porous discharge anode 15 and the porous accelerating electrode 16 can be reduced, and efficient cooling of the center part of a first center porous part 151 of the porous discharge anode 15, that particularly becomes high temperature. <P>COPYRIGHT: (C)2010,JPO&INPIT |
