| 摘要 |
<p><P>PROBLEM TO BE SOLVED: To restrain unexpected fluctuation in tilting angle of a mirror due to interference from adjacent wiring in a mirror device and a mirror array in which a plurality of mirror devices are disposed in two dimensions. <P>SOLUTION: Wires 1005-1 to 1005-4, 1006 are provided in the direction orthogonal to the rotating axis of a gimbal 1102. Thus, unexpected fluctuation in tilting angle of the mirror 1103 due to interference from the wires 1005-1 to 1005-4, 1006 can be restrained, and the wires 1005-1 to 1005-4, 1006 are separated from the mirror 1103 to further improve the restraining effect. <P>COPYRIGHT: (C)2010,JPO&INPIT</p> |
