| 摘要 |
PROBLEM TO BE SOLVED: To provide a pressure sensor module with improved robustness to acidic conditions. SOLUTION: The pressure sensor module includes a sensing element 1 mounted on a front side 3 of a support member 5. The support member 5 includes a hole 7 through the support member 5 from the front side 3 to a back side 9. The sensing element 1 covers the hole 7 at the front side 3. A back side barrier 6 provided at the back side 9 of the support member 5 surrounds a surface of the back side 9 of the support member 5 and forms an enclosed area 8. The enclosed area 8 and the hole 7 form a pressure channel 10. A back side protective member 2 fills the hole 7 and at least partially the enclosed area 8. The support member 5, the back side barrier 6, and the back side protective member 2 form a module that can be placed during production of the pressure sensor in a housing of the pressure sensor. COPYRIGHT: (C)2010,JPO&INPIT |
