SUBSTRATE PROCESSING APPARATUS

摘要

<P>PROBLEM TO BE SOLVED: To provide a substrate processing apparatus that relieves a shock of a fall to prevent a quartz base from being broken when the quartz base is installed. Ž<P>SOLUTION: A plurality of buffer members 266 are provided between a substrate holder and a cover body. The buffer members 266 each has a projection portion 271 and a mounting portion 272. The projection portion 271 is disposed on an outer circumferential side of the cover body. The mounting portion 272 is formed gradually decreasing in thickness from the projection portion 271 to the center side of the cover body, and slid to be extracted. Ž<P>COPYRIGHT: (C)2010,JPO&INPIT Ž