| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide a precision mask for film deposition, even if, when being immersed into a liquid body and dried, in which adjoining beams are not adhered each other and the shape of the opening parts among the beams is maintained. Ž<P>SOLUTION: The precision mask for film deposition composed of single crystal silicon comprises first beams 2 parallelly arranged at prescribed intervals and forming a plurality of opening parts 3 long to one direction and at least a streak of second beam 4 arranged so as to be crossed with the first beams 2, and, provided that the length of the opening parts 3 divided by the second beam(s) 4 is defined as opening length L, the second beam(s) is arranged in such a manner that the opening length L of the opening part 3 whose opening length L is longest among a plurality of the opening parts 3 is controlled to a prescribed value or below, and, the second beam(s) 4 is arranged in such a manner that, when the precision mask 1 for precision is immersed into a liquid body and is dried, the adjoining first beams 2 are not adhered each other. Ž<P>COPYRIGHT: (C)2010,JPO&INPIT Ž
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