ANALYSIS OF A REACTIVE GAS SUCH AS SILANE FOR PARTICLE GENERATING IMPURITIES

摘要

PURPOSE: A system for detecting impurities in the air, during an ultra high pure process, is provided to detect low levels of impurities. CONSTITUTION: A method for providing gas to a treating device comprises a step of sampling vapor flow in the upstream of a treating device having a particle counter and particle capture filter to detect the amount of suspended contaminated particles. An apparatus for maintaining the purity level of a vapor supply stream of the treating device comprises: a supply source for supplying vapor; a treatment tool which is suitable for treating the vapor; the particle counter(50) arranged at the upstream of the treatment tool and the downstream of the supply source; and the particle capture filter(60).