| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide an appearance inspecting apparatus for a flat workpiece, which can obtain a high inspection accuracy. Ž<P>SOLUTION: The appearance inspecting apparatus for the flat workpiece, which inspects states of the front and back surfaces of the flat workpiece, includes: a surface inspection-use conveyor 10 for conveying the workpiece to the downstream side along a conveyor line so as to make the front surface upward; a surface photographing device which is disposed above the surface inspection-use conveyor 10 and photographs the surface of the workpiece on the surface inspection-use conveyor 10; a workpiece reversing device 31 for reversing the workpiece carried out of the surface inspection-use conveyor 10, such that the back surface is made upward; a back surface inspection-use conveyor 20 for conveying the workpiece whose back surface is made upward by the workpiece reversing device 31, to the downstream side along the conveyor line; and a back surface photographing device which is disposed above the back surface inspection-use conveyor 20 and photographs the back surface of the workpiece on the back surface inspection-use conveyor. Ž<P>COPYRIGHT: (C)2010,JPO&INPIT Ž
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