| 发明名称 |
PRODUCTION METHOD FOR COMPOSITION FOR FORMING LIQUID IMMERSION UPPER LAYER FILM |
| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide a production method for a composition for forming a liquid immersion upper layer film can reduce an impurity such as metal. <P>SOLUTION: This production method for the composition for forming the liquid immersion upper layer film includes a process for bringing a monomer for a liquid immersion upper layer polymer or a polymerization solution obtained by polymerizing the monomer, into contact with an ion exchange resin having a cation exchange group. <P>COPYRIGHT: (C)2010,JPO&INPIT |
| 申请公布号 |
JP2010039148(A) |
申请公布日期 |
2010.02.18 |
| 申请号 |
JP20080201382 |
申请日期 |
2008.08.05 |
| 申请人 |
JSR CORP |
发明人 |
MAEDA YOSHIO;SUGAWARA TETSUNORI;YAMAZAKI AI;TAKIYA ATSUSHI |
| 分类号 |
G03F7/11;C08J3/09;C08J7/12;H01L21/027 |
主分类号 |
G03F7/11 |
| 代理机构 |
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