| 摘要 |
PROBLEM TO BE SOLVED: To provide a planar type electromagnetic actuator that brings a pair of static magnetic field generating means close enough to each other without any restrictions by a chip to make a static magnetic field effectively work on a driving coil. SOLUTION: A chip 5 includes a frame 1, a moving plate 3 turnably supported by torsion bar springs 2 and 2 with respect to the frame 1, and a driving coil 4 provided in the moving plate 3 to generate a magnetic field when energized. A planar type electromagnetic actuator is such that the chip 5 and a pair of static magnetic filed generating means 6 and 6 which apply a static magnetic field to a portion of the driving coil which is parallel to the torsion bar springs 2 and 2 of the chip 5 are mounted on a base substrate 7. A counterbore 9 is formed in the base substrate 7, and the chip 5 is stored in the counterbore 9 such that the top faces of the chip 5 and base substrate 7 may be substantially flush with each other. The pair of opposing static magnetic field generating means 6 and 6 are so placed as to straddle the top faces of the base substrate 7 and chip 5 with the moving plate 3 therebetween. COPYRIGHT: (C)2010,JPO&INPIT
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