| 摘要 |
PROBLEM TO BE SOLVED: To provide a washing system which keeps a washing fluid clean in the case of washing while separating impurities from the washing fluid. SOLUTION: The washing system 10A includes a gas chromatograph 20 to analyze the components of the impurities included in the washing fluid, a gas-liquid separation device 18 to separate the impurities included in the washing fluid from the washing fluid, and a controller 21. The gas chromatograph 20 includes a first analyzing means to analyze the components of the impurities included in the washing fluid after washing a filter 11 and a first output means to output the analysis result analyzed by the first analyzing means to the controller 21. The controller 21 includes a type specification means to specify the type of impurities included in the washing fluid from the analysis result, a first adjusting means of pressure to adjust the pressure of the washing fluid within the gas-liquid separation device 18 to a first setting pressure suitable for the type of the impurities and a first adjusting means of temperature to adjust the temperature of the washing fluid within the gas-liquid separation device 18 to a first setting temperature suitable for the type of the impurities. COPYRIGHT: (C)2010,JPO&INPIT
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