发明名称 METHOD AND APPARATUS FOR MANUFACTURING THIN FILM, AND METHOD FOR MANUFACTURING ELECTRONIC DEVICE
摘要 A method for manufacturing a thin film, includes the steps of: mixing a thin-film forming material and a surfactant to prepare a dispersion in which the thin-film forming material is dispersed; forming a dispersion film from the dispersion at an inner circumference side of ring-shaped holding means; relatively moving a cylindrical supporter and the dispersion film while being in contact with each other so that the dispersion is transferred on a surface of the supporter to have a film shape, the supporter being disposed between a central portion of an inside space of the holding means and an outer circumference thereof and along an inner circumference of the holding means; drying the dispersion having a film shape formed on the surface of the supporter to form the thin film.
申请公布号 US2010040771(A1) 申请公布日期 2010.02.18
申请号 US20090538345 申请日期 2009.08.10
申请人 SONY CORPORATION 发明人 KADONO KOJI
分类号 B05D5/12;B05C9/12 主分类号 B05D5/12
代理机构 代理人
主权项
地址
您可能感兴趣的专利