| 摘要 |
PROBLEM TO BE SOLVED: To provide a vacuum processing device that prevents the problem of gas generated from cables and detects the position of a movable part in a vacuum chamber from the outside of the vacuum chamber while maintaining a vacuum condition in the vacuum chamber. SOLUTION: A sensor head 32 detects location information of a supporting base 4. The location information is converted by a transmitter 95 to optical signals L1, L2 and L3 which are emitted to a receiver 81 outside a vacuum chamber 1 through a light transparent part 113b. The optical signals L1, L2 and L3 caught by the receiver 81 can be converted into the position information by a driver/power supply unit 8. Accordingly, it is not necessary to lead a cable outside the vacuum chamber through a via hole or install the cable inside the vacuum chamber 1 to send the position information by forming the via hole on a barrier 11 of the vacuum chamber 1, so that the position information of the supporting base 4 can be detected from the outside of the vacuum chamber 1. Consequently, the problem of gas generated from cables can be prevented and the position of the supporting base 4 inside the vacuum chamber 1 can be detected from the outside of the vacuum chamber 1, while maintaining a vacuum condition in the vacuum chamber. COPYRIGHT: (C)2010,JPO&INPIT |
