| 摘要 |
PROBLEM TO BE SOLVED: To provide a surface emitting laser having a concave surface relief structure allowing highly accurate layer thickness control and highly reproducible and uniform single mode operation; and its manufacturing method. SOLUTION: The surface emitting laser is constituted of a lower reflecting mirror, an active layer and an upper reflecting mirror laminated on a substrate, has a reflectance controlling structure constituted of a low reflectance region and a concave high reflectance region formed at the center of the low reflectance region in a light outgoing part of the upper reflecting mirror and oscillates at a wavelengthλ. The upper reflector is constituted of a multilayer film reflecting mirror of a laminated structure formed by laminating a plurality of layers. The multilayer film reflecting mirror has a phase adjusting layer having an optical thickness ofλ/8 or more and 3λ/8 or less on its light outgoing peripheral part of the multilayer film reflecting mirror and an absorption layer of an absorption coefficient of 5,000 cm<SP>-1</SP>or more relative to the wavelengthλis formed in the phase adjusting layer. COPYRIGHT: (C)2010,JPO&INPIT |
