发明名称 SEMICONDUCTOR DEVICE AND ITS PRODUCTION PROCESS
摘要 PROBLEM TO BE SOLVED: To provide a semiconductor device in which a diffusion problem with a surface layer forming metal can be certainly solved, magnetically adverse effects on a semiconductor element, and further are eliminated by realizing a non-magnetic external electrode, deterioration of electrical conductivity is not caused even when the frequency of a transmit signal increases. SOLUTION: An Ni-P layer 11 is inserted between a Cu layer 12 making up an external electrode 3 and a surface layer (Au layer) 10. Ni-P making up such a Ni-P layer 11 shows excellent adhesion for both Cu and Au, and can effectively prevent Au from being diffused. In addition, since the Ni-P is non-magnetic, and further, no magnetic metals are purged from an external electrode 3, the entire external electrode 3 can be made completely non-magnetic. Since this can certainly prevent a magnetic impact from a magnetic metal layer from reaching the semiconductor element 2, a malfunction of the semiconductor element 2 is prevented, thus contributing to the enhancement of semiconductor device's reliability. COPYRIGHT: (C)2010,JPO&INPIT
申请公布号 JP2010040679(A) 申请公布日期 2010.02.18
申请号 JP20080200235 申请日期 2008.08.01
申请人 KYUSHU HITACHI MAXELL LTD 发明人 NAKAGAWA HIROSHI
分类号 H01L23/50;H01L23/12 主分类号 H01L23/50
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