| 摘要 |
PROBLEM TO BE SOLVED: To provide an electrostatic chuck device where there is no possibility of cracks occurring in an electrostatic chuck part, even if a temperature of a plate-like sample to be placed is rapidly raised/lowered, which is superior in durability, has small heat capacity which is superior in heat exchange efficiency and heat responsiveness with the placed plate-like sample, and which can easily maintain the in-plane temperature of the plate-like sample to a desired temperature pattern. SOLUTION: The electrostatic chuck device 21 includes an electrostatic chuck part 22, which has an installation face 31a on which the plate-like specimen W is placed and in which an electrostatic adsorption internal electrode 33 is arranged inside, a temperature-adjusting base part 23 where a passage 41 circulating a heating medium is formed inside and an organic adhesive layer 24 which bonds and integrates the electrostatic chuck part 22 and the temperature adjusting base part 23 and incorporates a heater element 25. COPYRIGHT: (C)2010,JPO&INPIT |
