| 摘要 |
<P>PROBLEM TO BE SOLVED: To analyze more elements by using a LIBS (Laser-induced Breakdown Spectroscopy) method. Ž<P>SOLUTION: This element analyzer has a laser light oscillator 1 for generating pulse laser light 3 generating plasma when being irradiated to a sample 16, a laser light condensing part constituted so as to be able to condense light in a domain whose maximum diameter is 50-200 μm on the sample surface 16a by a laser light condensing lens 6, and a laser light irradiation part for irradiating light onto a light condensing domain on the sample surface 16a. A sample arrangement part 15 in which the atmosphere of the sample surface 16a is held airtightly, constituted so that the sample 16 can be installed inside, and receiving laser light irradiation, is arranged on the laser light irradiation side of the laser light irradiation part. The analyzer also has a fluorescence condensing part 13 for condensing fluorescence 22 discharged from a position separated as long as a prescribed distance in an optical axis direction from the sample surface 16a in the fluorescence 22 generated from the plasma 21, and a means for determining an element content based on the wavelength of the fluorescence 22 condensed by the fluorescence condensing part 13 and on the intensity of the wavelength. Ž<P>COPYRIGHT: (C)2010,JPO&INPIT Ž
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