| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide a method for producing high-quality samples for, e.g., TEM inspection. Ž<P>SOLUTION: When thinning down samples with, e.g., a focused ion beam (FIB) apparatus, the sample often oxidizes owing to the exposure to air when taken from the FIB. This results in low-quality samples, which may be unfit for further analysis. By forming a passivation layer, preferably a hydrogen passivation layer, on the sample in situ, i.e., before taking the sample from the FIB, high-quality samples are obtained. Ž<P>COPYRIGHT: (C)2010,JPO&INPIT Ž
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