METHOD AND APPARATUS FOR COATING DROPLET

摘要

PROBLEM TO BE SOLVED: To equalize variation of discharge amounts of individual nozzles due to individual differences of the nozzles, on the basis of landing areas of droplets discharged from the individual nozzles and landing on a substrate, even when there is a variation in contact angles of a coating solution to individual areas of a substrate for inspection. SOLUTION: A droplet application method of discharging the coating solution from a plurality of nozzles N disposed in a coating head 5 in the form of droplets to apply to the substrate K includes: a process of determining the variation of contact angles in the individual areas of the substrate K0 for inspection; a process of determining the target landing areas of droplets to land from the individual nozzles on the individual areas of the substrate K0 for inspection when amounts of droplets discharged from individual nozzles are equalized while correcting through the variation of contact angles in the individual areas; and a process of controlling discharge amounts of the individual nozzles on the basis of target landing areas for the individual nozzles. COPYRIGHT: (C)2010,JPO&INPIT