| 摘要 |
PURPOSE: An air knife apparatus which increase ejection efficiency of dry air is provided to reduce washing solution from a substrate by ejecting air through an ejection tip. CONSTITUTION: An air knife apparatus which increase ejection efficiency of dry air comprises a main body(2), first and second chamber parts(4,6), an ejecting unit(8), and first and second ejection slits(8a,8b). The main body has an air inlet. The first chamber part is received with drying air(A) from the air inlet. The second chamber part is apart from the first chamber part. The ejecting unit is composed of a plurality of the blade(B1,B2,B3) for ejection. The first and second ejection slits have first and second ejection tip. The first ejection tip ejects air in order to dry the first chamber part. The second ejection tip ejects air in a different direction with the first ejection tip.
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