发明名称 A THIN FILM TRANSISTOR SUBSTRATE AND A FABRICATING METHOD OF THE SAME
摘要 <p>PURPOSE: A thin film transistor substrate and a fabricating method of the same are provided to apply a etch stopper to an insulating substrate in oxide semiconductor thin film transistor producing, thereby improving reliability of the oxide semiconductor thin film transistor. CONSTITUTION: An oxide semiconductor active layer pattern(141) is formed around a gate electrode(112). A passivation layer is formed on a data line and the oxide semiconductor active layer pattern. The passivation layer includes the first opening unit(162) for exposure of a drain electrode connecting unit(132) and the second opening unit(163) for exposure of the oxide semiconductor active layer pattern. A drain electrode(151) electrically connects the oxide semiconductor active layer pattern and the drain electrode connecting unit through the first opening unit and the second opening unit.</p>
申请公布号 KR20100018168(A) 申请公布日期 2010.02.17
申请号 KR20080076813 申请日期 2008.08.06
申请人 SAMSUNG ELECTRONICS CO., LTD. 发明人 LEE, YOUNG WOOK;YOO, HONG SUK;SONG, JEAN HO;YOUN, JAE HYOUNG;KIM, JONG IN
分类号 G02F1/136;H01L29/786 主分类号 G02F1/136
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